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[15860] Artykuł: Determine the metrology characteristics of an optical device Talysurf CCI Lite produced by Taylor HobsonCzasopismo: Transcom 2013 10th European Conference of Young Researchers and Scientists Strony: 13-16ISSN: 9788-0554 Opublikowano: Czerwiec 2013 Autorzy / Redaktorzy / Twórcy Grupa MNiSW: Pozostałe publikacje (niepunktowane) Punkty MNiSW: 0 Pełny tekst Keywords: coherence correlation interferometer  measurement  roughness  line profilometer  |
The main target of this paper is to determine the metrology characteristics of an optical device Talysurf CCI Lite produced by Taylor Hobson. The characteristics were determined by performing a series of measurements, in which they where using properly selected reference samples. The obtained results where analyze using the appropriate statistical models.